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Development of a Highly Sensitive Humidity Sensor Based on a Piezoelectric Micromachined Ultrasonic Transducer Array

Changhe Sun1,2,3,4,5, Qiongfeng Shi6,7, Mahmut Sami Yazici8,9

  • 1Centre for Intelligent Sensing Technology, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China. chsun@cqu.edu.cn.

Sensors (Basel, Switzerland)
|December 15, 2018
PubMed

Keywords:
array structuregraphene oxidehigh sensitivityhumidity sensorpiezoelectric micromachined ultrasonic transducer

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