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Updated: Jan 31, 2026

Fabrication and Characterization of Superconducting Resonators
Published on: May 21, 2016
The impact of area on BAW resonator performance and an approach to device miniaturization
Ngoc Nguyen1, Agne Johannessen1, Stig Rooth2
1Department of Microsystems, University of South-Eastern Norway, Raveien 215, 3184 Borre, Norway.
Abstract:
The dependence of the performance of thin film bulk acoustic resonator (FBAR) and solidly mounted resonator (SMR), on their areas is studied with the aid of finite element method (FEM) software. Dual step frame method is applied for both types of the resonators in order to improve their quality factors at resonance and at antiresonance frequency when they are miniaturized. The important role of the material quality in promoting the benefit of this method is also emphasized in this study.
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