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Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

Pawel Knapkiewicz1

  • 1Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology, Wroclaw 50-372, Poland. pawel.knapkiewicz@pwr.edu.pl.

Micromachines
|January 4, 2019
PubMed

Keywords:
MEMS cellsatomic referencesfrequency standardsmicrofabrication

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