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Updated: Jan 31, 2026

Atomically Traceable Nanostructure Fabrication
Published on: July 17, 2015
The Fabrication of Nanostructures on Polydimethylsiloxane by Laser Interference Lithography
Jun Wu1, Zhaoxin Geng2, Yiyang Xie3
1Key Laboratory of Optoelectronics Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China. wdison@emails.bjut.edu.cn.
Abstract:
We report a method for fabricating periodic nanostructures on the surface of polydimethylsiloxane (PDMS) using laser interference lithography. The wave-front splitting method was used for the system, as the period and duty cycle can be easily controlled. Indium tin oxide (ITO) glass reveals favorable characteristics for controlling the standing waves distributed in the vertical direction, and was selected as the rigid substrate for the curing of the PDMS prepolymer, photoresist spin coating, and exposure processes. Periodic nanostructures such as gratings, dot, and hole arrays were prepared. This efficient way of fabricating large area periodic nanoscale patterns will be useful for surface plasmonic resonance and wearable electronics.
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