Application of first-order nonparaxial scalar theory to determine surface scattering intensity of multilayer optical...

A novel first-order nonparaxial scalar theory for calculating the angular scattering that is caused by the interface roughness in an optical multilayer was proposed. As in the case that the interface roughness is moderate, the analytic expressions of angular-resolved scattering for a typical p-layer design were derived. Notably, these formulas are general because they do not depend on the prior restrictive hypothesis for the correlation degree of the various interfaces in a stack. In order to verify the theory, the formulas in the case of single-surface are presented and are exactly identical to those of the generalized Harvey-Shack theory. Also, their smooth-surface approximations are the same in form as those given by the typical first-order vector perturbation theories and are validated by numerically comparing with the typical vector theory for three representative multilayer design types with slightly rough interfaces. In addition, the usability of the novel theory in the case of moderate roughness is discussed by comparing this theory to the typical theories for optical coatings at different roughness levels.