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    Germanium micro-gears on silicon pillars demonstrate optical gain for CMOS chips. These devices generate optical modes with orbital angular momentum (OAM), a first for germanium light sources.

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    Area of Science:

    • Optoelectronics
    • Materials Science
    • Nanotechnology

    Background:

    • Germanium (Ge) is a promising material for optical gain media on complementary metal-oxide-semiconductor (CMOS) chips.
    • Tensile strain is crucial for overcoming Ge's indirect bandgap and enabling efficient light emission.
    • Existing methods for strain induction in Ge are limited, necessitating novel approaches for on-chip integration.

    Purpose of the Study:

    • To engineer tensile strain in high-crystalline-quality germanium-on-silicon-on-insulator (Ge-on-SOI) micro-gears.
    • To investigate the optical properties and light emission characteristics of strained Ge micro-gears.
    • To demonstrate the generation of optical modes with orbital angular momentum (OAM) in a Ge-based light source.

    Main Methods:

    • Fabrication of Ge micro-gears on silicon pillars using etching techniques.
    • Induction of biaxial tensile strain via thermal stresses in encapsulating SiO2 layers.
    • Characterization using Raman spectroscopy, finite-element method (FEM) simulations, and photo-luminescence (PL) spectroscopy.
    • Analysis of optical modes using finite-difference time-domain (FDTD) simulations.

    Main Results:

    • Achieved biaxial tensile strain in Ge micro-gears ranging from 0.3-0.5%.
    • Observed multiple sharp-peak resonances in the direct-gap region of Ge at room temperature via PL.
    • Identified vertically emitted optical modes with non-zero orbital angular momentum (OAM) using FDTD simulations.

    Conclusions:

    • Successfully demonstrated strain engineering in Ge micro-gears for enhanced optical properties.
    • Achieved room-temperature photo-luminescence from strained Ge, indicating potential for light emission.
    • First-ever demonstration of orbital angular momentum (OAM) generation from a germanium light source.