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Multiple Laser Stripe Scanning Profilometry Based on Microelectromechanical Systems Scanning Mirror Projection

Gailing Hu1,2, Xiang Zhou3,4,5, Guanliang Zhang6,7

  • 1State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China. hugl@mail.xjtu.edu.cn.

Micromachines
|January 19, 2019
PubMed

Keywords:
3D measurementMEMS scanning mirrorMLSSPlaser stripe widthvibration noise

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