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Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications-Towards the CMOS-MEMS Monolithic Approach

Haotian Liu1, Li Zhang2, King Ho Holden Li3,4

  • 1School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore 639798, Singapore. liuht@ntu.edu.sg.

Micromachines
|February 5, 2019
PubMed

Keywords:
gas sensormetal oxide (MOX) sensormicro-electro-mechanical system (MEMS)microhotplate

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