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Updated: Jan 29, 2026

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
Published on: June 18, 2020
Low-Frequency Vibration Sensor with a Sub-nm Sensitivity Using a Bidomain Lithium Niobate Crystal
Ilya V Kubasov1, Aleksandr M Kislyuk2, Andrei V Turutin3,4
1Department of the Materials Science of Semiconductors and Dielectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia. kubasov.ilya@gmail.com.
We developed a novel low-frequency vibration sensor using a lithium niobate (LiNbO₃) cantilever. This sensor detects sub-nanometer vibrations with high sensitivity, showing promise for harsh environments.
Area of Science:
- Materials Science
- Physics
- Engineering
Background:
- Accurate detection of low-frequency vibrations is crucial for various applications.
- Existing sensors may struggle with sub-nanometer amplitudes or harsh environmental conditions.
Purpose of the Study:
- To develop and characterize a novel low-frequency vibration sensor.
- To evaluate the sensor's sensitivity and detection limits for sub-nanometer vibrations.
Main Methods:
- Utilized a cantilever made of a single-crystalline lithium niobate (LiNbO₃) plate with a bidomain ferroelectric structure.
- Measured sensor response to sinusoidal vibrational excitations in terms of displacement and acceleration amplitude.
- Analyzed sensor sensitivity and smallest detectable vibration across a frequency range up to 150 Hz.
Main Results:
- Demonstrated linear sensor response to vibrational displacement amplitude up to 150 Hz.
- Achieved sensitivities ranging from 20 μV/nm to 92.5 mV/nm and 7 V/g to 2443 V/g.
- Showcased smallest detectable vibrations varying from 100 nm at 7 Hz to 0.1 nm above 38 Hz.
Conclusions:
- The developed LiNbO₃ cantilever sensor effectively detects ultra-weak, low-frequency vibrations.
- Bidomain lithium niobate single crystals are promising sensitive elements for vibration detection in demanding conditions.
- The sensor exhibits potential for applications requiring high sensitivity across a wide temperature range.
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