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Updated: Jan 29, 2026

Nanostructured Ag-zeolite Composites as Luminescence-based Humidity Sensors
Published on: November 15, 2016
Low-Hysteresis and Fast Response Time Humidity Sensors Using Suspended Functionalized Carbon Nanotubes
Shivaram Arunachalam, Ricardo Izquierdo1, Frederic Nabki2
1Department of Electrical Engineering, École de Technologie Supérieure, Montreal, QC H3C 1K3, Canada. ricardo.izquierdo@etsmtl.ca.
Abstract:
A humidity sensor using suspended carbon nanotubes (CNTs) was fabricated using a low-temperature surface micromachining process. The CNTs were functionalized with carboxylic acid groups that facilitated the interaction of water vapor with the CNTs. The humidity sensor showed a response time of 12 s and a recovery time of 47 s, along with superior hysteresis and stable performance. The hysteresis curve area of the suspended structure is 3.6, a 3.2-fold reduction in comparison to the non-suspended structure. A comparative study between suspended and non-suspended devices highlights the advantages of using a suspended architecture.
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