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Area of Science:

  • Coherent diffractive imaging
  • X-ray microscopy
  • Nanoscale imaging

Background:

  • Ptychography, a type of coherent diffractive imaging (CDI), allows imaging of extended samples using raster scanning.
  • Table-top ptychography is crucial for widespread scientific and industrial applications.
  • Previous table-top setups were limited to imaging features larger than the illuminating wavelength.

Purpose of the Study:

  • To demonstrate sub-wavelength resolution using a table-top ptychography setup.
  • To achieve imaging of small and closely-spaced features in extended fields of view.
  • To qualify the imaging system for real-world applications.

Main Methods:

  • Utilized a high-order harmonic extreme ultraviolet (XUV) source with high photon flux.
  • Employed a raster scanning approach across the XUV beam for extended sample imaging.
  • Applied a Rayleigh-type criterion as a resolution metric.

Main Results:

  • Achieved resolution of features as small as 2.5λ (45nm).
  • Demonstrated high-resolution imaging with a table-top ptychography setup.
  • Successfully applied a Rayleigh criterion for unambiguous resolution assessment.

Conclusions:

  • The developed table-top ptychography system offers sub-wavelength resolution.
  • This advancement makes high-resolution nanoscale imaging accessible for various applications.
  • The system is suitable for biological sciences, material sciences, integrated circuits, and semiconductor inspection.