Beams
Deflection of a Beam
Electron Carriers
Electron Affinity
Prismatic Beams: Problem Solving
Principal Stresses in a Beam
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Updated: Jan 29, 2026

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
Published on: February 12, 2017
Rob Hooley1, Andy Brown1, Rik Brydson1
1School of Chemical and Process Engineering, University of Leeds, Leeds, LS2 9JT, UK.
Electron irradiation degrades calcite nanoparticles, transforming them into calcium oxide and carbon dioxide. Scanning TEM (STEM) offers higher electron fluence thresholds than conventional TEM (CTEM) for detecting lattice faults.
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