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Luminescence from Si-Implanted SiO₂-Si₃N₄ Nano Bi-Layers for Electrophotonic Integrated Si Light Sources

Alfredo A González-Fernández1, Joan Juvert2, Mariano Aceves-Mijares3

  • 1INAOE, Department of Electronics, P.O. Box 51, Puebla 72000, Mexico. research@gonzalez-fernandez.net.

Sensors (Basel, Switzerland)
|February 23, 2019
PubMed

Keywords:
SROXPSelectrophotonicsintegrated photonicsoxynitridephotoluminescence

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