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Materials processing using radio-frequency ion-sources: Ion-beam sputter-deposition and surface treatment

M Becker1, M Gies1, A Polity1

  • 1Institute for Experimental Physics I and Center for Materials Research (LaMa), Justus Liebig University Giessen, Giessen, Germany.

The Review of Scientific Instruments
|March 6, 2019
PubMed

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