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Implementation of a Reference Interferometer for Nanodetection
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A phase modulating homodyne interferometer with tilting error compensation by use of an integrated four-photodetector

Yingtian Lou1, Liping Yan1, Benyong Chen1

  • 1Nanometer Measurement Laboratory, Zhejiang Sci-Tech University, Hangzhou 310018, China.

The Review of Scientific Instruments
|March 6, 2019
PubMed

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