Benyong Chen
3PUBLICATIONS
1CO-AUTHORS
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Publications (3)
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|Mar 06, 2019
A phase modulating homodyne interferometer with tilting error compensation by use of an integrated four-photodetector.Yingtian Lou, Liping Yan, Benyong Chen
|May 03, 2018
Note: Comparison experimental results of the laser heterodyne interferometer for angle measurement based on the Faraday effect.Enzheng Zhang, Benyong Chen, Hao Zheng
|Apr 05, 2017
A heterodyne straightness and displacement measuring interferometer with laser beam drift compensation for long-travel linear stage metrology.Benyong Chen, Liang Cheng, Liping Yan
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