Overcoming diffusion-related limitations in semiconductor defect imaging with phonon-plasmon-coupled mode Raman

Changkui Hu1,2, Qiong Chen1, Fengxiang Chen1,2

  • 11University of North Carolina at Charlotte, Charlotte, NC 28223 USA.

Summary

Raman imaging with LO phonon-plasmon-coupled modes recovers optical resolution, overcoming limitations of carrier diffusion length in semiconductor defect analysis. This technique enables precise defect characterization and simultaneous mapping of carrier properties.

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