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Updated: Jan 28, 2026

Production and Characterization of Vacuum Deposited Organic Light Emitting Diodes
Published on: November 16, 2018
Electrical and Optical Properties of a Transparent Conductive ITO/Ga₂O₃/Ag/Ga₂O₃ Multilayer for Ultraviolet
Siwei Liang1,2, Quanbin Zhou3,4, Xianhui Li5,6
1Engineering Research Center for Optoelectronics of Guangdong Province, School of Physics and Optoelectronics, South China University of Technology, Guangzhou 510640, China. phswliang@foxmail.com.
Abstract:
We fabricated an indium tin oxide (ITO)/Ga₂O₃/Ag/Ga₂O₃ multilayer as a transparent conductive electrode for ultraviolet light-emitting diodes (UV LEDs). The electrical and optical properties of the multilayer were improved by optimizing the annealing temperature of the ITO contact layer and the whole ITO/Ga₂O₃/Ag/Ga₂O₃ multilayer, and the thickness of the ITO contact layer and Ag metal layer. After optimization, the sheet resistance and transmittance of the ITO/Ga₂O₃/Ag/Ga₂O₃ multilayer was 3.43 Ω/sq and 86.4% at 335 nm, respectively. The ITO/Ga₂O₃/Ag/Ga₂O₃ multilayer also exhibited a good ohmic contact characteristic with a specific contact resistance of 1.45×10-3 Ω·cm². These results show that the proposed ITO/Ga₂O₃/Ag/Ga₂O₃ multilayer is a promising alternative as a p-type electrode for UV LEDs.
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