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Updated: Jan 27, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
Improvements on the uniformity of large-area microlens arrays in Fused Silica
Abstract:
The uniformity of large microlens arrays in Fused Silica is governed by the production process. It comprises photolithographic patterning of a spin-coated layer of photoresist on a 200mm wafer with a molten resist reflow process and subsequent dry etching. By investigating systematic influences throughout the production process we show how to steer the lens production process with a single degree of freedom to improve the uniformity of the final microlens array. To enable this we describe the optical performance of microlenses with only one parameter: the principal aberration component. It is the result of principal component analysis of the chosen optical merit function. We present the case of manufactured microlens arrays with element sizes >100 mm × 100 mm where uniformity was improved by a factor of 2.
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