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The concept of the looking-glass self describes how an individual's self-concept is shaped by their perception of how others see them. This psychological theory, first introduced by sociologist Charles Horton Cooley in 1902, posits that self-identity emerges in a social context and is influenced by the judgments—real or imagined—of others.Research suggests that individuals frequently overestimate how positively others perceive them. This is particularly evident in physical...
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Generating Multiscale Gold Nanostructures on Glass without Sidewall Deposits Using Minimal Dry Etching Steps.

Saugandhika Minnikanti1,2, Jungjoon Ahn1, Yaw S Obeng1

  • 1National Institute of Standards and Technology , 100 Bureau Drive , Gaithersburg , Maryland 20899 , United States.

ACS Nano
|March 20, 2019
PubMed
Summary
This summary is machine-generated.

This study introduces a novel gold etching technique using common glass etching gases. The method creates precise 50 nm gold nanofeatures on glass, ideal for biological applications.

Keywords:
gold etchingnanoelectrodesnanogapsnanopatternsreactive ion etchingsidewall veil

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Area of Science:

  • Nanoscience and Nanotechnology
  • Materials Science
  • Surface Engineering

Background:

  • Fabricating micro- to nanometer-scale features is crucial for advanced technologies, especially in biological applications requiring transparent substrates.
  • Traditional wet etching methods are insufficient for nanometer-scale features, while dry etching often requires harsh conditions and results in residual materials.
  • Existing dry etching methods for gold struggle to achieve fine features without defects like sidewall deposits (veils).

Purpose of the Study:

  • To develop an improved dry etching method for fabricating gold nanofeatures on transparent substrates.
  • To achieve precise control over feature size and aspect ratio without compromising surface quality.
  • To demonstrate the functionality of etched gold nanostructures for biological applications.

Main Methods:

  • Utilized reactive ion etching (RIE) with a trifluoromethane (CHF3)/oxygen (O2) gas mixture at room temperature and mild pressure.
  • Controlled the oxygen concentration during RIE to prevent sidewall deposits (veils) and achieve desired aspect ratios.
  • Fabricated gold nanofeatures down to 50 nm on glass substrates.

Main Results:

  • Successfully etched gold films to produce features as small as 50 nm with an aspect ratio of 2 in a single step.
  • Achieved veil-free sidewalls and flat surfaces, suitable for subsequent material deposition.
  • Demonstrated high electrical conductivity of the etched gold nanofeatures after carbon nanotube deposition, confirming their functionality as nanoelectrodes.

Conclusions:

  • Developed a mild, single-step RIE process for creating high-quality gold nanofeatures on glass.
  • The method offers a viable route for producing biocompatible, conductive, and stable gold nanostructures for biomedical and biological applications.
  • The process overcomes limitations of traditional etching techniques, enabling advanced nanoscale fabrication for optical monitoring and device integration.