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Updated: Jan 27, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Fabrication and Characterization of a Miniaturized 15-MHz Side-Looking Phased-Array Transducer Catheter
Abstract:
This paper describes the development of a miniaturized 15-MHz side-looking phased-array transducer catheter. The array features a 2-2 linear composite with 64 piezoelectric elements mechanically diced into a piece of PMN-30%PT single crystal and separated by non-conductive epoxy kerfs at a 50-μm pitch, yielding a total active aperture of 3.2 mm in the azimuth direction and 1.8 mm in the elevation direction, with an elevation natural focal depth of 8.1 mm. The array includes non-conductive epoxy backing and two front matching layers. A custom flexible circuit connects the array piezoelectric elements to a bundle of 64 individual 48-AWG micro-coaxial cables enclosed within a 1.5-m long 10F catheter. Performance characterization was evaluated via finite element analysis simulations and afterwards compared against obtained measurement results, which showed an average center frequency of 17.7 MHz, an average bandwidth of 52.2% at -6 dB, and crosstalk less than -30 dB. Imaging of a tungsten fine-wire phantom resulted in axial and lateral spatial resolutions of approximately 90 μm and 420 ìm, respectively. The imaging capability was further evaluated with colorectal tissue-mimicking phantoms, demonstrating the potential suitability of the proposed phased-array transducer for the intraoperative assessment of surgical margins during minimally invasive colorectal surgery procedures.
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