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    Controlling electrode resistivity is crucial for capacitive micromachined ultrasonic transducers (CMUTs). A new design criterion, based on the frequency, resistance, and capacitance (ωRC), ensures minimal AC signal attenuation for optimal ultrasound imaging performance.

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    Area of Science:

    • Electrical Engineering
    • Materials Science
    • Acoustics

    Background:

    • Electrode resistivity significantly impacts the performance of capacitive micromachined ultrasonic transducers (CMUTs).
    • Variations in fabrication processes lead to differing electrode resistivities, especially when traditional metal electrodes are not feasible.
    • A critical question arises regarding the acceptable threshold for electrode resistivity to ensure device functionality.

    Purpose of the Study:

    • To establish a design criterion for determining sufficiently low electrode resistivity in CMUTs.
    • To model the attenuation of alternating current (AC) signals along CMUT elements.
    • To optimize CMUT design for achieving desired transmit pressure magnitude and directionality for ultrasound imaging.

    Main Methods:

    • Development of a simple design criterion based on the non-dimensional product ωRC (angular excitation frequency, resistance, capacitance).
    • The criterion ensures AC potential drop along a CMUT element is less than 1% when ωRC < 0.35.
    • Experimental verification using two Row-Column addressed (RCA) CMUT transducers with varying bottom electrode resistivities (0.1 Ωcm vs. 0.005 Ωcm).

    Main Results:

    • A design criterion (ωRC < 0.35) was established to limit AC potential drop to under 1% along CMUT elements.
    • CMUTs designed with low electrode resistivity exhibited uniform pressure emission.
    • High electrode resistivity in one RCA CMUT transducer resulted in a frequency-dependent pressure drop along columns (63%-82% at 2-7 MHz).

    Conclusions:

    • The developed design criterion provides a method to estimate device parameters for optimal CMUT performance in ultrasound imaging.
    • Electrode resistivity significantly affects CMUT transmit pressure uniformity and requires careful consideration during fabrication.
    • The study highlights the importance of low resistivity electrodes for achieving uniform acoustic fields in CMUT devices.