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Updated: Jan 27, 2026

Fabrication of 1-D Photonic Crystal Cavity on a Nanofiber Using Femtosecond Laser-induced Ablation
Published on: February 25, 2017
Design and Fabrication of Monolithic Photonic Crystal Fiber Acoustic Sensor
Yu-Po Wong1, Simon Lorenzo1, Olav Solgaard1
1Edward L. Ginzton Laboratory, Stanford University, Stanford, CA 94305 USA (mkenwong@stanford.edu; slorenzo@stanford.edu, solgaard@stanford.edu).
Abstract:
Single-crystal silicon is an excellent optical and mechanical material, but its properties are compromised by the incorporation of other materials required for functionality or structural support. Here we describe a monolithic silicon acoustic sensor based on a sensing diaphragm with an integrated Photonic Crystal (PC) mirror. Diaphragm deflection is measured in a Fabry-Perot resonator formed between the PC mirror and a gold coated single-mode fiber. The sensors are fabricated on standard silicon wafers by standard CMOS processing technologies, yielding monolithic, low-stress sensing diaphragms. The packaged sensor exhibits a minimum detectable pressure of 10 in the 8 kHz to 17 kHz frequency range.
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