Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode.

Area of Science:

• Microelectromechanical Systems (MEMS)
• Optical Engineering
• Control Systems

Background:

• Electrostatic microscanners are crucial for optical systems but face limitations in scan range and frequency response.
• Conventional control methods struggle with nonlinearities and higher-order modes, impacting scan accuracy.
• Quasistatic operation is desired for stability but limits dynamic performance.

Purpose of the Study:

• To develop and validate an input shaping method for electrostatic microscanners based on experimental transfer functions.
• To enhance the usable scan range (USR) and extend the operational frequency of microscanners.
• To compare the proposed method's performance against conventional control strategies.

Main Methods:

• Utilized an experimental transfer function for input shaping control.
• Drove an electrostatic microscanner in a quasistatic mode.
• Experimentally evaluated performance based on usable scan range (USR) and optical scan angle (OSA).

Main Results:

• Achieved a usable scan range (USR) of 96% for a total optical scan angle (total OSA) up to 9° with a 1.5% scan line error criterion.
• Observed degraded USR for larger total OSA due to nonlinear electrostatic torque.
• Maintained USR above 90% for frequencies up to 160 Hz, with decreases at higher frequencies.

Conclusions:

• The proposed input shaping method offers a simple yet effective approach for improving electrostatic microscanner performance.
• The method demonstrates good performance and a wide operable range compared to conventional control.
• Experimental validation confirms the method's efficacy in mitigating scan errors and extending frequency capabilities.