Angular resolution expected from iCHORD orientation maps through a revisited ion channeling model

Area of Science:

• Materials Science
• Solid State Physics
• Microscopy Techniques

Background:

• Crystalline orientation mapping is crucial for microstructural characterization.
• Focused Ion Beam (FIB) microscopy offers advanced imaging capabilities.
• The ion CHanneling ORientation Determination (iCHORD) method utilizes ion channeling in secondary electron imaging.

Purpose of the Study:

• To evaluate the angular resolution of the iCHORD method in FIB microscopy.
• To present a revisited ion channeling model for improved accuracy.
• To establish a self-referential method for assessing orientation map resolution.

Main Methods:

• Utilized a revisited ion channeling model to analyze the iCHORD method.
• Developed a specific procedure to evaluate angular resolution based on orientation errors.
• Tested the method on a nickel-based sample under standard acquisition conditions.

Main Results:

• Achieved an angular resolution of 1° for crystalline orientation mapping.
• Demonstrated the effectiveness of the iCHORD method for microstructural characterization.
• Validated the self-referential procedure for resolution evaluation.

Conclusions:

• The iCHORD method in FIB microscopy provides high angular resolution (1°) suitable for microstructural analysis.
• The developed evaluation procedure is independent of external references.
• The technique shows potential as an alternative to Electron Back Scattered Diffraction for certain applications.