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Updated: Jan 26, 2026

Terahertz Microfluidic Sensing Using a Parallel-plate Waveguide Sensor
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Analytical performance of μ-groove silicon attenuated total reflection waveguides

Julian Haas1, Anja Müller2, Lorenz Sykora2

  • 1Insitute of Analytical and Bioanalytical Chemistry, Ulm University, Albert-Einstein-Allee 11, 89081 Ulm, Germany. boris.mizaikoff@uni-ulm.de.

The Analyst
|April 18, 2019
PubMed
Summary

Micromachined silicon ATR elements offer a cost-effective solution for infrared spectroscopy. Their analytical performance was evaluated using Fourier-transform infrared and quantum cascade laser spectroscopy for potential medical applications.

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