A method of z-tomography using high-aperture soft X-ray microscopy

Multilayer normal-incidence mirrors allow the numerical aperture (NA=0.3-0.5) of a projection lens to be significantly increased in the spectral ranges of the water (λ = 2.3-4.4 nm) and carbon (λ = 4.4-7 nm) windows, in comparison with the Fresnel zone plates. The low depth of focus of high-aperture optics (tens of nm) makes it possible to use z-tomography to reconstruct the structure of samples in soft X-ray microscopy. The presence of strong absorption prevents the direct use of a powerful deconvolution apparatus developed for fluorescence optical microscopy to improve the clarity of the image. In this article, the "intensity restoration algorithm" is proposed that takes into account the absorption effect before standard deconvolution. For an imagine lens with NA = 0.3 and a working wavelength of 3.37 nm, the results of simulating an image of a protein cell and its deconvolutionary processing are presented, before and after applying the proposed method. After its application, the deconvolution efficiency is significantly increased. A "full-period" resolution of 40 nm was obtained for the image of a simulated protein cell.