Technique for forming substrates for grazing incidence X-ray mirrors with cylindrical surface profiles

The paper demonstrates the possibility of forming flat substrates for grazing incidence X-ray mirrors with an accuracy of RMS ∼0.7n m, and also implements a technique for manufacturing grazing incidence X-ray optical elements with cylindrical surface profiles, using ion beam etching. The technique assumes the linear movement of the workpiece behind a slit diaphragm with a speed that varies depending on the coordinate. The result of the work was the creation of a pair of X-ray mirror substrates for a Kirkpatrick-Baez collimating system, having surface shape deviations from the ideal plane of H _M1=1.05µm and H _M2=1.13µm, and from the calculated parabolic cylinders of R M S _M1=3.0n m and R M S _M2=2.9n m. The described technique makes it possible to produce substrates for mirrors in the form of elliptical and parabolic cylinders used in commercial diffractometers, synchrotrons, and free electron lasers for collimation and focusing of X-ray radiation, as well as in the telescopes of space observatories.