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Effect of Conditioner Type and Downforce, and Pad Surface Micro-Texture on SiO2 Chemical Mechanical Planarization

Jeffrey McAllister1, Calliandra Stuffle2, Yasa Sampurno3,4

  • 1Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, USA. jemcalli@email.arizona.edu.

Micromachines
|April 21, 2019
PubMed

Keywords:
SiO2chemical mechanical planarizationconditioner discpad surface micro-texture

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