MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control.

Area of Science:

• MEMS (Micro-Electro-Mechanical Systems) technology
• Inertial Sensors
• Sensor Signal Processing

Background:

• Dual-mass MEMS gyroscopes are crucial for navigation and motion sensing.
• Temperature variations significantly impact gyroscope performance, leading to scale factor and bias drift.
• Existing compensation methods often have limitations in addressing these temperature-dependent errors.

Purpose of the Study:

• To propose and validate a novel temperature compensation method for dual-mass MEMS gyroscopes.
• To improve the accuracy and stability of MEMS gyroscopes under varying temperature conditions.
• To reduce scale factor and bias drift through drive mode vibration characteristic compensation.

Main Methods:

• Analysis of gyroscope drive and sense modes to understand scale factor dependency on drive mode amplitude.
• Implementation of a temperature variable resistor to dynamically compensate the drive amplitude working point with temperature changes.
• Design and simulation of a temperature compensation circuit.
• Modular output for compensating temperature bias drift.

Main Results:

• Scale factor variation reduced from 3.680% to 1.577% within a -40 °C to 60 °C temperature range.
• Bias variation decreased from 3.880% to 1.913% over the same temperature range.
• Bias value improved by 78.26% (from 103.395 °/s to 22.478 °/s).
• Bias stability and angular rate walking parameter optimized by 45.97% and 16.08%, respectively.

Conclusions:

• The proposed temperature compensation method effectively mitigates scale factor and bias drift in dual-mass MEMS gyroscopes.
• The use of a temperature variable resistor offers a practical and efficient approach to enhance gyroscope performance.
• Experimental results validate the significant improvements in accuracy, stability, and performance parameters.