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Updated: Jan 25, 2026

Metal-Assisted Electrochemical Nanoimprinting of Porous and Solid Silicon Wafers
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Metal-Assisted Electrochemical Nanoimprinting of Porous and Solid Silicon Wafers

Published on: February 8, 2022

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Investigation of ultrasonic absorption in the MHz frequency range by silicon substrates with a built-in porous

J Lascaud1, T Defforge1, G Gautier1

  • 1GREMAN UMR 7347, Université de Tours, CNRS, INSA Centre Val de Loire, 16 rue Pierre et Marie Curie, 37071 Tours cedex 2, France.

Ultrasonics
|April 28, 2019
PubMed

Keywords:
AttenuationPorous siliconSubstrateUltrasound transducers

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