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Updated: Jan 25, 2026

Development of an Experimental Setup for the Measurement of the Coefficient of Restitution under Vacuum Conditions
Published on: March 29, 2016
Modular interface and experimental setup for in-vacuum operation of microfluidic devices
Damien Maillard1, Annalisa De Pastina1, Tom Larsen1
1Advanced NEMS Laboratory, Institute of Mechanical Engineering, École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland.
Abstract:
We report on the design and operation of a world-to-chip microfluidic interface and experimental setup for fluidic micro- and nano-electromechanical systems. The central component of the interface is an engineered polyether ether ketone connector that brings fluid samples from a commercial syringe pump to the chip with the help of o-rings. In addition to that, the connector serves as an on-chip vacuum chamber. To confirm the adequate operation of our interface, we use complex microfluidic devices that were previously fabricated, suspended microchannel resonators, and demonstrate a fast exchange between fluids (on the scale of 130 s from isopropyl alcohol to water), in-vacuum operation of the devices (intrinsic damping regime), and accurate temperature control of the chip at different set points.
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