Modular interface and experimental setup for in-vacuum operation of microfluidic devices.

Area of Science:

• Engineering
• Physics
• Materials Science

Background:

• Microfluidic systems require robust interfaces for fluid delivery and environmental control.
• Existing interfaces can limit experimental flexibility and performance for micro- and nano-electromechanical systems (MEMS/NEMS).

Purpose of the Study:

• To design and validate a versatile world-to-chip microfluidic interface for MEMS/NEMS.
• To demonstrate the interface's capability for rapid fluid exchange, in-vacuum operation, and precise temperature regulation.

Main Methods:

• Fabrication of a polyether ether ketone (PEEK) connector serving as a fluid interface and on-chip vacuum chamber.
• Integration with commercial syringe pumps and pre-fabricated microfluidic devices, including suspended microchannel resonators.
• Experimental validation of fluid exchange times, vacuum performance, and temperature control accuracy.

Main Results:

• Demonstrated rapid fluid exchange (130 seconds from isopropyl alcohol to water).
• Achieved stable in-vacuum operation, enabling the study of intrinsic damping regimes.
• Confirmed accurate chip temperature control across various set points.

Conclusions:

• The developed microfluidic interface effectively supports complex MEMS/NEMS experiments.
• The interface enhances experimental capabilities by enabling fast fluid exchange, vacuum operation, and precise thermal management.
• This technology advances research in microfluidics and electromechanical systems.