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Selective Area Modification of Silicon Surface Wettability by Pulsed UV Laser Irradiation in Liquid Environment
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Enhanced Humidity Sensing Response of SnO2/Silicon Nanopillar Array by UV Irradiation

Wei Li1,2, Linlin Wang3, Yun Cai4

  • 1College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China. Liw@njupt.edu.cn.

Sensors (Basel, Switzerland)
|May 12, 2019
PubMed

Keywords:
SnO2 filmUV lighthumidity sensingsilicon nanopillar array

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