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Recommended practice for calibrating vacuum gauges of the ionization type
James A Fedchak1, Patrick J Abbott1, Jay H Hendricks1
1National Institute of Standards and Technology (NIST), Gaithersburg, MD 20899.
This article details a recommended practice for calibrating ionization gauges using a comparison method against an SI-traceable standard. It covers both hot- and cold-cathode types, providing guidance on apparatus, operation, data analysis, and uncertainty reporting.
Area of Science:
- Metrology
- Vacuum Science
Background:
- Accurate pressure measurements are crucial in various scientific and industrial applications.
- Ionization gauges are widely used for measuring low pressures in vacuum systems.
- Standardized calibration procedures ensure reliable and comparable measurement results.
Purpose of the Study:
- To provide a recommended practice for calibrating ionization gauges.
- To detail the comparison method for gauge calibration.
- To ensure SI traceability for ionization gauge calibrations.
Main Methods:
- Calibration of ionization gauges using the comparison method.
- Comparison against a working standard with SI traceable calibration.
- Applicable to both hot-cathode and cold-cathode ionization gauges.
Main Results:
- Detailed description of the calibration apparatus.
- Explanation of the principle of operation for ionization gauges.
- Methodology for data analysis, uncertainty budget, and reporting.
Conclusions:
- The recommended practice facilitates accurate and traceable calibration of ionization gauges.
- Standardized procedures enhance the reliability of low-pressure measurements.
- Comprehensive guidance supports metrologists and vacuum scientists in calibration processes.
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