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Updated: Jan 24, 2026

Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
Effect of layer and stacking sequence in simultaneously grown 2H and 3R WS2 atomic layers
Ruilong Yang1, Shanghuai Feng1, Xunyong Lei2,3
1Center for High Pressure Science, State Key Lab of Metastable Materials Science and Technology, Yanshan University, Qinhuangdao 066004, People's Republic of China.
This study demonstrates large-scale synthesis of 2H and 3R stacked multilayer tungsten disulfide (WS₂) crystals. Stacking order significantly influences optical and electronic properties, impacting Raman and photoluminescence spectra.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Nanotechnology
Background:
- Layer number and stacking order critically influence properties of 2D layered materials.
- Tungsten disulfide (WS₂) typically exists in the 2H phase, but other structures like 3R are possible.
- Understanding structural influences is key for novel electronic and optical applications.
Purpose of the Study:
- To achieve simultaneous large-scale growth of 2H and 3R stacked multilayer WS₂ crystals.
- To investigate the effects of layer number and stacking order on WS₂ optical and electronic properties.
- To explore spin or valley polarization in CVD-grown WS₂.
Main Methods:
- Simultaneous large-scale growth of 2H and 3R WS₂ using chemical vapor deposition (CVD).
- Characterization using Raman spectroscopy and photoluminescence (PL) measurements.
- Investigation of circularly polarized luminescence under circularly polarized excitation.
Main Results:
- Both 2H and 3R WS₂ showed similar PL and Raman peak variations with increasing layer number.
- 3R stacked WS₂ exhibited distinct red/blue shifts in Raman peaks and lower energy PL peaks compared to 2H WS₂.
- Circularly polarized luminescence confirmed spin or valley polarization in the synthesized WS₂ crystals.
Conclusions:
- Optical and electronic properties of multilayer WS₂ are dependent on both layer number and stacking order.
- The study provides a method for synthesizing WS₂ with controlled stacking for tailored properties.
- Demonstrated spin/valley polarization in CVD-grown WS₂ opens avenues for spintronic and valleytronic devices.
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