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Fabrications of L-band LiNbO3-based SAW Resonators for Aerospace Applications

Baofa Hu1,2,3, Shaoda Zhang4,5, Hong Zhang6

  • 1Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China. hubaofa@stu.xmu.edu.cn.

Micromachines
|May 31, 2019
PubMed

Keywords:
SAW sensingSurface acoustic wave (SAW)electron beam lithographyresonator

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