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Published on: August 21, 2018
Observation of Nonlinear Standing Waves Excited by Plasma-Series-Resonance-Enhanced Harmonics in Capacitive
Kai Zhao1,2, De-Qi Wen1, Yong-Xin Liu1
1Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, China.
Abstract:
We report the first experimental observation of nonlinear standing waves excited by plasma-series-resonance-enhanced harmonics in low pressure, very high frequency, parallel plate, capacitively coupled plasmas. Spatial structures of the harmonics of the magnetic field, measured by a magnetic probe, are in very good agreement with simulations based on a nonlinear electromagnetics model. At relatively low pressure, the nonlinear sheath motion generates high-order harmonics that can be strongly enhanced near the series resonance frequencies. Satisfying certain conditions, such nonlinear harmonics induce radial standing waves, with voltage and current maxima on axis, resulting in center-high plasma density. Excitation of higher harmonics is suppressed at higher pressures.
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