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Updated: Jan 24, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Jian Liu1, Weisong Zhao1, Chenguang Liu1
1Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, No. 2, Yikuang Str., Nangang District, Harbin 150080, China.
This study introduces an accurate aberration correction method for confocal microscopy using a liquid-crystal spatial light modulator (LCSLM). The technique significantly enhances image intensity, improving confocal microscopy performance.
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