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Updated: Jan 24, 2026

Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing
Published on: March 7, 2018
Dynamic focal shift and extending depth of focus based on the masking of the illuminating beam and using an
Abstract:
We investigate several methods of focus shift and focus extension in detail. These methods are divided into two groups: (1) changing the radius of the illuminating beam and/or limiting diaphragm; and (2) adding an optical system with an adjustable element (lens or axicon). In the cases of a planar and Gaussian illuminating beam, values of the focus position and depth of focus (DOF) are calculated theoretically and numerically, depending on the beam radius. In addition, theoretical and numerical evaluations of displacement and DOF increase for the focusing system with the adjustable lens or axicon obtained. We show that these methods for changing the parameters of the focal area provide flexibility and efficiency in the control of its characteristics. Recommendations about possible applications in which such control is important are formulated on the basis of the results obtained.
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