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Updated: Jan 24, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

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In-line wavefront aberration adjustment of a projection lens for a lithographic tool using the dominant mode method

Zhiyong Yang, Xiuguo Chen, Hao Jiang

    Applied Optics
    |June 4, 2019
    PubMed

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