New development of atomic layer deposition: processes, methods and applications

Peter Ozaveshe Oviroh1, Rokhsareh Akbarzadeh1, Dongqing Pan2

  • 1Mechanical Engineering Science Department, Faculty of Engineering and the Built Environment, University of Johannesburg, Johannesburg, South Africa.

Summary

Atomic Layer Deposition (ALD) offers uniform, controllable thin-film growth for electronics and beyond. This review covers ALD

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