Broadband Absorption Tailoring of SiO₂/Cu/ITO Arrays Based on Hybrid Coupled Resonance Mode

Sub-wavelength artificial photonic structures can be introduced to tailor and modulate the spectrum of materials, thus expanding the optical applications of these materials. On the basis of SiO₂/Cu/ITO arrays, a hybrid coupled resonance (HCR) mechanism, including the epsilon-near-zero (ENZ) mode of ITO, local surface plasmon resonance (LSPR) mode and the microstructural gap resonance (GR) mode, was proposed and researched by systematically regulating the array period and layer thickness. The optical absorptions of the arrays were simulated under different conditions by the finite-difference time-domain (FDTD) method. ITO films were prepared and characterized to verify the existence of ENZ mode and Mie theory was used to describe the LSPR mode. The cross-sectional electric field distribution was analyzed while SiO₂/Cu/ITO multilayers were also fabricated, of which absorption was measured and calculated by Macleod simulation to prove the existence of GR and LSPR mode. Finally, the broad-band tailoring of optical absorption peaks from 673 nm to 1873 nm with the intensities from 1.8 to 0.41 was realized, which expands the applications of ITO-based plasmonic metamaterials in the near infrared (NIR) region.