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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

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Large thermal tuning of a polymer-embedded silicon nitride nanobeam cavity

Yueyang Chen, James Whitehead, Albert Ryou

    Optics Letters
    |June 15, 2019
    PubMed

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