A New Design of an MOEMS Gyroscope Based on a WGM Microdisk Resonator
Dunzhu Xia1, Lingchao Huang2, Liye Zhao3
1Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China. 101010203@seu.edu.cn.
Abstract:
In this paper, we present a new design for a micro-opto-electro-mechanical (MOEMS) gyroscope based on a whispering-gallery mode (WGM) microdisk resonator and MEMS resonator. The mechanical characteristics, frequency split, and quality factor (Q) of the MEMS resonator; the optical characteristics, Q value, and coupling regimes of the WGM resonator; and the coupling between the two resonators were analyzed. Its operation principle-the transformation process from angular velocity to the resonance wavelength of the WGM resonator-is presented at same time. Next, the analysis conclusions were validated with the help of simulations in ANSYS and FDTD (Finite-Difference Time-Domain) Solutions. Afterwards, some key specifications were estimated based on the results of simulations. Lastly, the fabrication process is detailed.
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