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An Approach to Measure Tilt Motion, Straightness and Position of Precision Linear Stage with a 3D Sinusoidal-Groove
Hsiu-An Tsai1,2, Yu-Lung Lo3
1Department of Mechanical Engineering, National Cheng Kung University, Tainan 70101, Taiwan. n18991152@mail.ncku.edu.tw.
Sensors (Basel, Switzerland)
|June 27, 2019
Summary
A new method uses a 3D grating and signal analysis to measure linear displacement and straightness errors in air-bearing stages. This enables real-time monitoring and error compensation for precision machinery.
Area of Science:
- Metrology and Precision Engineering
- Optical Measurement Techniques
Background:
- Accurate measurement of linear displacement and straightness is crucial for precision machinery.
- Existing methods often measure these parameters separately, increasing complexity and cost.
- Air-bearing stages require high-accuracy error detection for optimal performance.
Purpose of the Study:
- To develop a novel, compact method for simultaneous measurement of linear displacement and vertical straightness errors.
- To enable real-time monitoring and error compensation in precision linear stages.
- To assess the performance and reliability of the proposed measurement technique.
Main Methods:
- Utilized a 3D sinusoidal-groove linear reflective grating.
- Implemented a novel triangular wave-based sequence signal analysis method.
- Analyzed two distinct signals for comprehensive error assessment, including tilt motion.
Main Results:
- Achieved maximum errors of <0.058° for tilt angle, <0.239 μm for linear displacement, and <0.188 μm for vertical straightness.
- Demonstrated maximum repeatability errors of ±0.189°, ±0.093 μm, and ±0.016 μm for the respective parameters.
- Verified the method's performance and reliability through experimental validation.
Conclusions:
- The proposed system offers a compact and efficient solution for simultaneous error measurement.
- Suitable for online measurement, real-time monitoring, and error compensation in multi-axis systems.
- Applicable across various industries requiring high-precision motion control.
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