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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Giuseppe Pezzotti1,2,3,4
1Ceramic Physics Laboratory , Kyoto Institute of Technology , Sakyo-ku, Matsugasaki , Kyoto 606-8585 , Japan.
Silicon nitride (Si3N4) shows unexpected medical benefits, enhancing tissue healing and fighting pathogens. Its unique surface chemistry, releasing silicon and nitrogen, explains its dual action on cells and microbes.
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