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    This study introduces a new method for analyzing spectroscopic ellipsometry data from rough surfaces, improving accuracy by avoiding the effective medium approximation (EMA) and enabling reliable optical constant extraction.

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    Area of Science:

    • Materials Science
    • Optics
    • Surface Science

    Background:

    • The effective medium approximation (EMA) model introduces significant errors in spectroscopic ellipsometry (SE) data analysis for micro-rough surfaces.
    • Ignoring lateral surface irregularities in EMA leads to inaccurate optical constant extraction for solid materials.

    Purpose of the Study:

    • Develop a novel inversion framework for accurate optical constant extraction from SE data of micro-rough surfaces.
    • Overcome the limitations of the EMA model in spectroscopic ellipsometry for non-ideal surfaces.

    Main Methods:

    • Integration of Levenberg-Marquardt optimization with first-principles calculations of electromagnetic scattering.
    • Accurate calculation of electromagnetic interactions with rough surfaces in each iteration, bypassing the EMA model.
    • Feasible error evaluation using instrumental errors from surface morphology detectors and SE.

    Main Results:

    • The developed framework provides precise optical constants for solid materials with randomly micro-rough surfaces.
    • The method demonstrates wide applicability for actual surfaces, not limited to Gaussian height distributions.
    • Accurate error estimation is achievable based on instrumental uncertainties.

    Conclusions:

    • The novel inversion framework offers a significant improvement over EMA for SE analysis of rough surfaces.
    • This approach ensures precision and broad applicability for characterizing optical properties of real-world materials.
    • Reliable error quantification enhances the trustworthiness of the extracted optical constants.