A high sensitivity quartz resonant pressure sensor with differential output and self-correction

Area of Science:

• Physics
• Materials Science
• Sensor Technology

Background:

• Quartz resonators offer high quality factors (Q) but are susceptible to environmental interference in high-precision applications.
• Environmental factors like temperature, vibration, and humidity can introduce significant errors in pressure sensor readings.
• Existing quartz resonant pressure sensors often lack robust mechanisms for real-time error compensation.

Purpose of the Study:

• To propose a high-sensitivity quartz resonant pressure sensor with differential output and self-correction capabilities.
• To develop a sensor that effectively mitigates environmental influences such as temperature drift and vibration.
• To demonstrate the feasibility and performance of the proposed sensor for high-tech industry applications.

Main Methods:

• Designing a sensor core with two units: a working unit for differential output and a reference unit for self-correction.
• Utilizing double-ended tuning fork quartz resonators manufactured via micromachining technology.
• Employing bellows and flexible mechanisms for pressure conversion, manufactured using modern mechanical technology.

Main Results:

• Achieved conformity accuracy of 0.0148% full scale (FS) and basic accuracy of 0.06% FS.
• Demonstrated high sensitivity of 36.58 Hz/kPa, aligning with theoretical predictions.
• Experimental validation confirmed the reference unit's effectiveness in correcting temperature and vibration interference.

Conclusions:

• The proposed quartz resonant pressure sensor with differential output and self-correction is feasible.
• The sensor design effectively compensates for environmental factors, meeting high-tech industry requirements.
• This technology offers a promising solution for accurate pressure measurement in challenging environments.