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Fabrication of Zero Mode Waveguides for High Concentration Single Molecule Microscopy
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Design and Fabrication of a Push-Pull Electrostatic Actuated Cantilever Waveguide Scanner
Wei-Chih Wang1,2,3,4, Kebin Gu5, ChiLeung Tsui6
1Department of Mechanical Engineering, University of Washington, Seattle, WA 98185, USA. abong@u.washington.edu.
Micromachines
|July 3, 2019
Summary
This study introduces a novel microelectromechanical systems (MEMS) 2D scanner using a push-pull actuator. The non-resonating system achieves 2D scanning motion with a significant field of view, overcoming fabrication uncertainties.
Area of Science:
- Microelectromechanical Systems (MEMS)
- Optical Scanning Systems
- Waveguide Technology
Background:
- Traditional scanning systems face limitations due to frequency shifts from fabrication uncertainties.
- Integrated optical systems require compact and precise scanning mechanisms.
Purpose of the Study:
- To present a novel, fully integrated MEMS-based 2D mechanical scanning system.
- To demonstrate non-resonating operation for improved stability and performance.
- To characterize the system's field of view and optical output.
Main Methods:
- Design and fabrication of a MEMS scanner utilizing a 1D push-pull electrostatic actuator.
- Integration with a SU-8 rib waveguide for broadband single-mode operation.
- Testing of 2D scanning motion and optical beam focusing with a GRIN lens.
Main Results:
- Successful demonstration of 2D scanning motion at 201 Hz (vertical) and 20 Hz (horizontal) in non-resonating mode.
- Achieved a field of view (FOV) of 0.019 to 0.072 radians.
- Observed resonances at 201 Hz and 536 Hz, with displacements up to 130 μm.
- Focused output beam to a 20 μm diameter at the focal plane.
Conclusions:
- The developed MEMS scanner offers a stable 2D scanning solution by operating in a non-resonating manner.
- The system effectively overcomes frequency shifts caused by fabrication variations.
- Further optimization is needed to improve waveguide transmission efficiency.
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